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ASML HOLDING N.V.

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Lev Ryzhikov Adel Joobeur Yevgeniy Konstantinovich Shmarev ASML HOLDING N.V., Assignor

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OPTICAL INTEGRATORS FOR LITHOGRAPHY SYSTEMS AND METHODS

11/488,174 | U.S. Patent Application

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Location ELECTRONIC

Filed July 18, 2006

Examiner JAMES JONES

Class 359

Art Group 2873

Patent No. 7,630,136

Case Type Utility - 359/629000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Last Updated: 1 year ago

Date	#	Transaction
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OPTICAL INTEGRATORS FOR LITHOGRAPHY SYSTEMS AND METHODS

11/488,174 | U.S. Patent Application

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