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DIFFRACTIVE OPTICAL POSITION DETECTOR IN AN ATOMIC FORCE MICROSCOPE HAVING A MOVEABLE CANTILEVER

11/93,187 | U.S. Patent Application

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Location ELECTRONIC
Filed March 28, 2005
Examiner QUE TAN LE
Class 250
Art Group 2878
Patent No. 7,084,384
Case Type Utility - 250/201300
Status Patented Case
Parent 10/226,625 Patented
Parent 60/314,075 Expired
Last Updated: 5 years ago
Date # Transaction