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High-power pulsed magnetically enhanced plasma processing

11/91,854 | U.S. Patent Application

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Location ELECTRONIC
Filed March 28, 2005
Examiner MAUREEN GRAMAGLIA PASSEY
Class 156
Art Group 1792
Case Type Utility - 156/345460
Status Abandoned -- Failure to Respond to an Office Action
Parent 10/65,551 Patented
Last Updated: 4 years, 6 months ago
Date # Transaction