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High deposition rate sputtering

11/91,814 | U.S. Patent Application

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Location ELECTRONIC
Filed March 28, 2005
Examiner RODNEY GLENN MCDONALD
Class 204
Art Group 1795
Case Type Utility - 204/298080
Status Abandoned -- Failure to Respond to an Office Action
Parent 10/65,739 Patented
Child 11/183,463 Patented
Child 12/879,036 Abandoned
Child 15/219,975 Abandoned
Last Updated: 4 years, 5 months ago
Date # Transaction