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Projection optical system, exposure apparatus, and exposure method

11/882,208 | U.S. Patent Application

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Location ELECTRONIC
Filed July 31, 2007
Examiner MEENAKSHI S SAHU
Class 250
Art Group 2881
Case Type Utility - 250/492200
Status Abandoned -- Failure to Respond to an Office Action
Parent 11/266,288 Patented
Parent PCT/JP04/06417 -
Parent 60/721,582 Expired
Child 12/379,415 Patented
Child 13/889,780 Patented
Child 14/227,349 Patented
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Last Updated: 2 years, 6 months ago
Date # Transaction