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TOKYO ELECTRON LIMITED

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Tsutomu Hiroki

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SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD

11/850,350 | U.S. Patent Application

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Location ELECTRONIC

Filed Sept. 5, 2007

Examiner GLENN F MYERS

Class 414

Art Group 3652

Patent No. 8,057,153

Case Type Utility - 414/217100

Status Patented Case

Parent 60/844,081 Expired

Child 2006-239983

Last Updated: 2 years, 6 months ago

Date	#	Transaction
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SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD

11/850,350 | U.S. Patent Application

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