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METHOD OF MANUFACTURING MICRO-ELECTROMECHANICAL DEVICE HAVING MOTION-TRANSMITTING STRUCTURE

11/8,115 | U.S. Patent Application

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Location ELECTRONIC
Filed Dec. 10, 2004
Examiner THIEM D PHAN
Class 029
Art Group 3729
Patent No. 7,337,532
Case Type Utility - 029/611000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 10/713,071 Patented
Parent 10/302,275 Patented
Parent 10/120,347 Patented
Parent 09/112,767 Patented
Child 12/15,261 Patented
Child 12/627,997 Patented
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Last Updated: 4 years, 11 months ago
Date # Transaction