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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

11/703,823 | U.S. Patent Application

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Location ELECTRONIC
Filed Feb. 8, 2007
Examiner HUNG NGUYEN
Class 355
Art Group 2882
Patent No. 7,965,380
Case Type Utility - 355/069000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 10/966,147 Patented
Last Updated: 3 years ago
Date # Transaction
7/29/2019Expire Patent
2/11/2019Maintenance Fee Reminder Mailed
6/21/2011Recordation of Patent Grant Mailed
6/21/2011Patent Issue Date Used in PTA Calculation
6/21/201161.5PTA 36 Months
6/21/201161Patent Issue Date Used in PTA Calculation
6/1/2011Issue Notification
6/1/2011Issue Notification Mailed
5/13/2011Dispatch to FDC
5/13/2011Application Is Considered Ready for Issue
5/13/201159Dispatch to FDC
5/13/201158Application Is Considered Ready for Issue
5/11/2011Issue Fee Payment (PTO-85B) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/11/2011Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
5/11/2011Electronic Filing System(EFS) Acknowledgment Receipt Office Actions Communications
5/11/2011Transmittal Letter
5/11/2011Issue Fee Payment Verified
5/11/2011Issue Fee Payment Received
5/11/201157Issue Fee Payment Verified
5/11/201156Issue Fee Payment Received
4/14/2011List of References cited by applicant and considered by examiner Documents including citations
2/28/2011Affidavit-submitted prior to Mar 15, 2013 Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/28/2011Index of Claims In-house documents including Examiner Notes/Search Results
2/28/2011Issue Information including classification, examiner, name, claim, renumbering, etc. Documents including classifications
2/28/2011Search information including classification, databases and other search related notes Documents including classifications
2/28/2011Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
2/28/2011Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
2/28/2011

Event:

Allowance
Mail Notice of Allowance
2/28/201153Mail Notice of Allowance
2/25/2011

Event:

Allowance
Notice of Allowance Data Verification Completed
2/25/201152Notice of Allowance Data Verification Completed
2/22/2011Terminal Disclaimer review decision In-house documents including Examiner Notes/Search Results
2/22/2011PARALEGAL OR ELECTRONIC TERMINAL DISCLAIMER APPROVED
2/22/201148PARALEGAL OR ELECTRONIC TERMINAL DISCLAIMER APPROVED
2/11/2011Date Forwarded to Examiner
2/11/201146Date Forwarded to Examiner
2/10/2011Response After Final Action Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/10/2011Claims Application Documents
2/10/2011Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/10/2011Terminal Disclaimer Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/10/2011Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
2/10/2011Electronic Filing System(EFS) Acknowledgment Receipt Office Actions Communications
2/10/2011Transmittal Letter
2/10/2011Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
2/10/2011Terminal Disclaimer Filed
2/10/2011Response after Final Action
2/10/201147Terminal Disclaimer Filed
2/10/201145Response after Final Action
11/29/2010Final Rejection Office Actions Communications
11/29/2010Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
11/29/2010Index of Claims In-house documents including Examiner Notes/Search Results
11/29/2010Search information including classification, databases and other search related notes Documents including classifications
11/29/2010Mail Final Rejection (PTOL - 326)
11/29/201044Mail Final Rejection (PTOL - 326)
11/23/2010Final Rejection
11/23/201043Final Rejection
10/15/2010Date Forwarded to Examiner
10/15/201042Date Forwarded to Examiner
10/12/2010Amendment/Request for Reconsideration-After Non-Final Rejection Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/12/2010Claims Application Documents
10/12/2010Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/12/2010Electronic Filing System(EFS) Acknowledgment Receipt Office Actions Communications
10/12/2010Transmittal Letter
10/12/2010Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
10/12/2010Response after Non-Final Action
10/12/201041Response after Non-Final Action
7/27/2010Non-Final Rejection First Office Action (substantive examination)
7/27/2010List of references cited by examiner Documents including citations
7/27/2010Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
7/27/2010Index of Claims In-house documents including Examiner Notes/Search Results
7/27/2010Search information including classification, databases and other search related notes Documents including classifications
7/27/2010List of References cited by applicant and considered by examiner Documents including citations
7/27/2010List of References cited by applicant and considered by examiner Documents including citations
7/27/2010List of References cited by applicant and considered by examiner Documents including citations
7/27/2010Mail Non-Final Rejection
7/27/201040Mail Non-Final Rejection
7/26/2010Non-Final Rejection
7/26/201039Non-Final Rejection
6/14/2010Date Forwarded to Examiner
6/14/201035Date Forwarded to Examiner
10/27/2009Response to Election / Restriction Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/27/2009Claims Application Documents
10/27/2009Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/27/2009Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
10/27/2009Electronic Filing System(EFS) Acknowledgment Receipt Office Actions Communications
10/27/2009Transmittal Letter
10/27/2009Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
10/27/2009Response to Election / Restriction Filed
10/27/200934Response to Election / Restriction Filed
10/6/2009Case Docketed to Examiner in GAU
10/6/200933Case Docketed to Examiner in GAU
9/30/2009Requirement for Restriction/Election Office Actions Communications
9/30/2009Bibliographic Data Sheet Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/30/2009Index of Claims In-house documents including Examiner Notes/Search Results
9/30/2009Mail Restriction Requirement
9/30/200932Mail Restriction Requirement
9/28/2009Restriction/Election Requirement
9/28/200931Restriction/Election Requirement
10/1/2008Transmittal Letter
10/1/2008Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
10/1/2008Foreign Reference Documents including citations
10/1/2008Foreign Reference Documents including citations
10/1/2008Foreign Reference Documents including citations
10/1/2008Electronic Filing System(EFS) Acknowledgment Receipt Office Actions Communications
10/1/2008Information Disclosure Statement considered
10/1/2008Reference capture on IDS
10/1/2008Information Disclosure Statement (IDS) Filed
10/1/2008Information Disclosure Statement (IDS) Filed
10/1/200836Information Disclosure Statement considered
10/1/200827Reference capture on IDS
10/1/200826Information Disclosure Statement (IDS) Filed
10/1/200825Information Disclosure Statement (IDS) Filed
9/15/2008Case Docketed to Examiner in GAU
9/15/200824Case Docketed to Examiner in GAU
11/28/2007Transmittal Letter
11/28/2007Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
11/28/2007Electronic Filing System(EFS) Acknowledgment Receipt Office Actions Communications
11/28/2007Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
11/28/2007Information Disclosure Statement considered
11/28/2007Information Disclosure Statement (IDS) Filed
11/28/2007Information Disclosure Statement (IDS) Filed
11/28/200737Information Disclosure Statement considered
11/28/200723Information Disclosure Statement (IDS) Filed
11/28/200721Information Disclosure Statement (IDS) Filed
11/8/2007Case Docketed to Examiner in GAU
11/8/200720Case Docketed to Examiner in GAU
11/1/2007PG-Pub Issue Notification
11/1/200719PG-Pub Issue Notification
8/14/2007IFW TSS Processing by Tech Center Complete
8/14/200717IFW TSS Processing by Tech Center Complete
8/9/2007Application Dispatched from OIPE
8/9/200713Application Dispatched from OIPE
7/25/2007Filing Receipt
7/25/2007Application Is Now Complete
7/25/200712Application Is Now Complete
7/20/2007Filing Receipt
7/20/2007Sent to Classification Contractor
7/20/20079Sent to Classification Contractor
7/16/2007Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/16/2007Extension of Time Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/16/2007Oath or Declaration filed Application Documents
7/16/2007Power of Attorney Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/16/2007Assignee showing of ownership per 37 CFR 3.73
7/16/2007Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
7/16/2007Electronic Filing System(EFS) Acknowledgment Receipt Office Actions Communications
7/16/2007Miscellaneous Incoming Letter
7/16/2007Payment of additional filing fee/Preexam
7/16/2007A statement by one or more inventors satisfying the requirement under 35 USC 115, Oath of the Applic
7/16/200716Miscellaneous Incoming Letter
7/16/200710Payment of additional filing fee/Preexam
7/16/20076A statement by one or more inventors satisfying the requirement under 35 USC 115, Oath of the Applic
4/17/2007Filing Receipt
4/17/2007Pre-Exam Formalities Notice Office Actions Communications
4/17/2007Notice Mailed--Application Incomplete--Filing Date Assigned
4/17/20075Notice Mailed--Application Incomplete--Filing Date Assigned
4/14/2007Cleared by L&R (LARS)
4/14/20074Cleared by L&R (LARS)
4/13/2007Referred to Level 2 (LARS) by OIPE CSR
4/13/20073Referred to Level 2 (LARS) by OIPE CSR
4/9/2007IFW Scan & PACR Auto Security Review
4/9/20072IFW Scan & PACR Auto Security Review
2/8/2007Transmittal of New Application Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/8/2007Specification Application Documents
2/8/2007Claims Application Documents
2/8/2007Abstract Application Documents
2/8/2007Drawings-only black and white line drawings Application Documents
2/8/2007Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
2/8/2007Application Data Sheet Application Documents
2/8/2007Authorization for Extension of Time all replies Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/8/2007Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
2/8/2007Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
2/8/2007Information Disclosure Statement considered
2/8/2007Information Disclosure Statement (IDS) Filed
2/8/2007Reference capture on IDS
2/8/2007Information Disclosure Statement (IDS) Filed
2/8/2007Initial Exam Team nn
2/8/200738Information Disclosure Statement considered
2/8/200718Information Disclosure Statement (IDS) Filed
2/8/200715Reference capture on IDS
2/8/200714Information Disclosure Statement (IDS) Filed
2/8/20071Initial Exam Team nn
2/8/20070.5Filing date