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Taiwan Semiconductor Manufacturing Company, Ltd.

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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

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Chun-Jen HSIAO Ya-Ping CHEN Chien-Hung LIN Wen-Pin LIU Chin-Wen CHEN

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PLASMA ASHING METHOD USING RESIDUE GAS ANALYZER

17/326,430 | U.S. Patent Application

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Location ELECTRONIC

Filed May 21, 2021

Examiner SHAMIM AHMED

Class 216

Art Group 1713

Case Type Utility - 216/067000

Status Notice of Allowance Mailed -- Application Received in Office of Publications

Parent 16/503,571 Patented

Parent 62/696,888 Expired

Last Updated: 1 year, 5 months ago

Date	#	Transaction
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PLASMA ASHING METHOD USING RESIDUE GAS ANALYZER

17/326,430 | U.S. Patent Application

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