Download Docs
Export

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

11/583,934 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location ELECTRONIC
Filed Oct. 20, 2006
Examiner ZIA R HASHMI
Class 250
Art Group 2881
Patent No. 7,309,870
Case Type Utility - 250/492200
Status Patented Case
Parent 11/266,288 Patented
Parent PCT/JP04/06417 -
Parent 60/721,582 Expired
Child 2003-128154
Child 2003-350647
Child 2003-364596
Last Updated: 2 years, 1 month ago
Date # Transaction