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PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

11/513,160 | U.S. Patent Application

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Location ELECTRONIC

Filed Aug. 31, 2006

Examiner ARNEL C LAVARIAS

Class 359

Art Group 2872

Patent No. 9,846,366

Case Type Utility - 359/365000

Status Patented Case

Parent 11/266,288 Patented

Parent PCT/JP04/06417 -

Parent 60/721,582 Expired

Child 12/884,332 Abandoned

Child 13/275,760 Patented

Child 2003-128154

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Last Updated: 2 years, 6 months ago

Date	#	Transaction
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PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

11/513,160 | U.S. Patent Application

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