Download Docs
Export

BIASED PULSE DC REACTIVE SPUTTERING OF OXIDE FILMS

11/228,717 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location ELECTRONIC
Filed Sept. 16, 2005
Examiner MICHELLE MANDALA
Class 438
Art Group 2823
Patent No. 7,413,998
Case Type Utility - 438/769000
Status Patented Case
Parent 10/101,863 Patented
Last Updated: 4 years, 10 months ago
Date # Transaction