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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

11/15,766 | U.S. Patent Application

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Location ELECTRONIC
Filed Dec. 20, 2004
Examiner HUNG NGUYEN
Class 355
Art Group 2851
Patent No. 7,528,931
Case Type Utility - 355/053000
Status Patented Case
Child 12/327,414 Patented
Child 13/188,096 Patented
Child 13/189,212 Patented
Child 14/500,386 Patented
Child 14/661,929 Patented
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Last Updated: 5 years, 4 months ago
Date # Transaction