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ROTATING PALLET IN SPUTTERING SYSTEM

11/106,864 | U.S. Patent Application

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Location ELECTRONIC
Filed April 14, 2005
Examiner JOHN JOSEPH BRAYTON
Class 204
Art Group 1795
Patent No. 7,744,730
Case Type Utility - 204/192120
Status Patented Case
Child PCT/US06/13036 Published
Last Updated: 4 years, 9 months ago
Date # Transaction