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EXPOSURE PATTERN FORMING METHOD AND EXPOSURE PATTERN

11/101,479 | U.S. Patent Application

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Location ELECTRONIC
Filed April 8, 2005
Examiner THUAN DO, V
Class 716
Art Group 2851
Patent No. 7,165,235
Case Type Utility - 716/021000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 10/297,211 Patented
Parent PCT/JP02/02992 -
Child JP2001-105355
Last Updated: 5 years, 1 month ago
Date # Transaction