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Inventors

Wenjie Li Pushkara R. Varanasi

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INTERNATIONAL BUSINESS MACHINES CORPORATION

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NEGATIVE PHOTORESIST AND METHOD OF USING THEREOF

10/820,117 | U.S. Patent Application

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Location ELECTRONIC

Filed April 7, 2004

Examiner SIN J LEE

Class 430

Art Group 1752

Patent No. 7,011,923

Case Type Utility - 430/270100

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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NEGATIVE PHOTORESIST AND METHOD OF USING THEREOF

10/820,117 | U.S. Patent Application

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