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METHOD FOR EXPOSING A SUBSTRATE WITH A STRUCTURE PATTERN WHICH COMPENSATES FOR THE OPTICAL PROXIMITY EFFECT

10/771,302 | U.S. Patent Application

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Location ELECTRONIC
Filed Feb. 5, 2004
Examiner CHRISTOPHER G YOUNG
Class 430
Art Group 1756
Patent No. 7,157,194
Case Type Utility - 430/030000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 10304674.7
Last Updated: 4 years, 9 months ago
Date # Transaction