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Inventors

Hiroyuki Hyodo Hideki Yamawaki Kenji Maruyama Masaharu Hida

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FUJITSU LIMITED

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SOLID MATERIAL GASIFICATION METHOD, THIN FILM FORMATION PROCESS AND APPARATUS

10/662,474 | U.S. Patent Application

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Location ELECTRONIC

Filed Sept. 16, 2003

Examiner WILLIAM D COLEMAN

Class 438

Art Group 2895

Patent No. 7,045,473

Case Type Utility - 438/706000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 11/378,290 Patented

Child 2002-277306

Last Updated: 4 years, 10 months ago

Date	#	Transaction
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SOLID MATERIAL GASIFICATION METHOD, THIN FILM FORMATION PROCESS AND APPARATUS

10/662,474 | U.S. Patent Application

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