Download Docs
Export

INTEGRATION OF ULTRA LOW K DIELECTRIC IN A SEMICONDUCTOR FABRICATION PROCESS

10/659,885 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location ELECTRONIC
Filed Sept. 11, 2003
Examiner GEORGE A GOUDREAU
Class 438
Art Group 1763
Patent No. 6,992,003
Case Type Utility - 438/689000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Last Updated: 4 years, 9 months ago
Date # Transaction