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INTEGRATION OF ULTRA LOW K DIELECTRIC IN A SEMICONDUCTOR FABRICATION PROCESS

10/659,885 | U.S. Patent Application

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Location ELECTRONIC
Filed Sept. 11, 2003
Examiner GEORGE A GOUDREAU
Class 438
Art Group 1763
Patent No. 6,992,003
Case Type Utility - 438/689000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Last Updated: 5 years, 1 month ago
Date # Transaction