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Click below for detailed party information:

Inventors

Brian J. Doherty Thomas R. Mariano Robert P. Sullivan

Assignee

BROOKS AUTOMATION, INC. UNDER THE NAME OF BROOKS-PRI AUTOMATION, INC.

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BROOKS AUTOMATION, INC., Assignor MURATA MACHINERY, LTD., Assignor BROOKS AUTOMATION, INC., Assignor

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AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS

10/393,526 | U.S. Patent Application

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Location ELECTRONIC

Filed March 20, 2003

Examiner CHARLES A FOX

Class 414

Art Group 3652

Patent No. 7,165,927

Case Type Utility - 414/331040

Status Patented Case

Parent 60/389,993 Expired

Parent 60/417,993 Expired

Child 11/652,707 Patented

Child 12/724,194 Patented

Child 13/492,341 Patented

Child 14/80,590 Patented

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Last Updated: 4 years, 8 months ago

Date	#	Transaction
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AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS

10/393,526 | U.S. Patent Application

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