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BIASED PULSE DC REACTIVE SPUTTERING OF OXIDE FILMS

10/954,182 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 1, 2004
Examiner MICHELLE MANDALA
Class 438
Art Group 2823
Patent No. 7,381,657
Case Type Utility - 438/002000
Status Patented Case
Parent 10/101,863 Patented
Child 11/191,643 Patented
Last Updated: 2 years, 10 months ago
Date # Transaction