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MICRO-ELECTROMECHANICAL DEVICE HAVING A LAMINATED THERMAL BEND ACTUATOR

10/713,084 | U.S. Patent Application

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Location ELECTRONIC
Filed Nov. 17, 2003
Examiner RAQUEL YVETTE GORDON
Class 347
Art Group 2853
Patent No. 7,066,574
Case Type Utility - 347/054000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 10/401,987 Patented
Child 11/185,721 Patented
Child 11/484,745 Patented
Child 11/707,039 Patented
Child 12/368,997 Patented
Child 12/857,357 Patented
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Last Updated: 4 years, 10 months ago
Date # Transaction