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METAL OXYNITRIDE CAPACITOR BARRIER LAYER

10/688,823 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 17, 2003
Examiner SCOTT R WILSON
Class 257
Art Group 2826
Patent No. 7,002,202
Case Type Utility - 257/310000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 09/999,281 Patented
Parent 09/484,815 Patented
Last Updated: 4 years, 2 months ago
Date # Transaction