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HIGH DEPOSITION RATE SPUTTERING

10/65,739 | U.S. Patent Application

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Location ELECTRONIC
Filed Nov. 14, 2002
Examiner RODNEY GLENN MCDONALD
Class 204
Art Group 1753
Patent No. 6,896,773
Case Type Utility - 204/192120
Status Patented Case
Child PCT/US03/34226 Published
Child 11/91,814 Abandoned
Child 12/879,036 Abandoned
Child 15/219,975 Abandoned
Last Updated: 4 years, 6 months ago
Date # Transaction