HIGH-POWER PULSED MAGNETRON SPUTTERING

10/65,277 | U.S. Patent Application

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Location ELECTRONIC
Filed Sept. 30, 2002
Examiner RODNEY GLENN MCDONALD
Class 204
Art Group 1753
Patent No. 7,147,759
Case Type Utility - 204/192120
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child PCT/US03/30427 Published
Child 11/608,833 Abandoned
Last Updated: 4 years, 5 months ago
Date # Transaction
1/14/2019Expire Patent
7/23/2018Maintenance Fee Reminder Mailed
2/9/2018Trial Certificate Mailed
2/9/2018Review Certificate Mailed
1/13/2018Review Certificate
3/11/2016Communication - Re: Power of Attorney (PTOL-308) Office Actions Communications
3/11/2016Communication - Re: Power of Attorney (PTOL-308) Office Actions Communications
3/11/2016Change in Power of Attorney (May Include Associate POA)
3/11/2016Correspondence Address Change
3/8/2016Power of Attorney Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/8/2016Assignee showing of ownership per 37 CFR 3.73
3/8/2016EFS Acknowledgment Receipt Office Actions Communications
3/8/2016Transmittal Letter
10/12/2015Appeal to CAFC Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/12/2015Appeal to CAFC Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/12/2015Appeal to CAFC Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/12/2015Appeal to CAFC Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/12/2015Appeal to CAFC Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/10/2014Request for Trial Granted
10/9/2014Request for Trial Granted
10/9/2014Request for Trial Granted
10/9/2014Request for Trial Granted
10/2/2014Request for Trial Granted
10/2/2014Request for Trial Granted
10/2/2014Request for Trial Granted
10/2/2014Request for Trial Granted
10/1/2014Request for Trial Granted
10/1/2014Request for Trial Granted
10/1/2014Request for Trial Granted
10/1/2014Request for Trial Granted
9/15/2014Trial Termination or Final Written Decision
9/15/2014Termination or Final Written Decision
8/27/2014Request for Trial Granted
8/27/2014Request for Trial Granted
8/27/2014Request for Trial Granted
8/27/2014Request for Trial Granted
8/27/2014Request for Trial Granted
8/27/2014Request for Trial Granted
8/27/2014Request for Trial Granted
8/27/2014Request for Trial Granted
8/27/2014Request for Trial Granted
8/27/2014Request for Trial Granted
6/30/2014Petition Requesting Trial
6/27/2014Petition Requesting Trial
6/25/2014Petition Requesting Trial
6/19/2014Petition Requesting Trial
6/19/2014Petition Requesting Trial
6/19/2014Petition Requesting Trial
6/19/2014Petition Requesting Trial
5/28/2014Petition Requesting Trial
5/28/2014Petition Requesting Trial
2/20/2014Petition Requesting Trial
2/20/2014Petition Requesting Trial
2/20/2014Petition Requesting Trial
2/20/2014Petition Requesting Trial
2/20/2014Petition Requesting Trial
8/15/2013Report on the filing or determination of an action regarding a patent Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/15/2013Report on the filing or determination of an action regarding a patent Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/15/2013Report on the filing or determination of an action regarding a patent Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/15/2013Report on the filing or determination of an action regarding a patent Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/14/2013Report on the filing or determination of an action regarding a patent Written Arguments, Opinions, Incoming amendments, Papers received from applicants
12/12/2006Recordation of Patent Grant Mailed
12/12/2006Patent Issue Date Used in PTA Calculation
12/12/200674Patent Issue Date Used in PTA Calculation
11/22/2006Issue Notification
11/22/2006Issue Notification Mailed
11/21/200674.5PTA 36 Months
11/8/2006Dispatch to FDC
11/8/200671Dispatch to FDC
10/31/2006Application Is Considered Ready for Issue
10/31/200670Application Is Considered Ready for Issue
10/30/2006Issue Fee Payment (PTO-85B) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/30/2006Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
10/30/2006EFS Acknowledgment Receipt Office Actions Communications
10/30/2006Issue Fee Payment Verified
10/30/2006Issue Fee Payment Received
10/30/200669Issue Fee Payment Verified
10/30/200668Issue Fee Payment Received
10/11/2006Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
10/11/2006Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
10/11/2006List of References cited by applicant and considered by examiner Documents including citations
10/11/2006Examiner Interview Summary Record (PTOL - 413) Office Actions Communications
10/11/2006Issue Information including classification, examiner, name, claim, renumbering, etc. Documents including classifications
10/11/2006Index of Claims In-house documents including Examiner Notes/Search Results
10/11/2006Search information including classification, databases and other search related notes Documents including classifications
10/11/2006

Event:

Allowance
Mail Notice of Allowance
10/11/2006Mail Examiner's Amendment
10/11/200666Mail Notice of Allowance
10/11/200665Mail Examiner's Amendment
10/2/2006

Event:

Allowance
Notice of Allowance Data Verification Completed
10/2/2006Examiner's Amendment Communication
10/2/200663Notice of Allowance Data Verification Completed
10/2/200662Examiner's Amendment Communication
9/29/2006Examiner Interview Summary Record (PTOL - 413)
9/29/200661Examiner Interview Summary Record (PTOL - 413)
8/29/2006Terminal Disclaimer review decision In-house documents including Examiner Notes/Search Results
8/29/2006PARALEGAL OR ELECTRONIC TERMINAL DISCLAIMER APPROVED
8/29/2006Date Forwarded to Examiner
8/29/200659PARALEGAL OR ELECTRONIC TERMINAL DISCLAIMER APPROVED
8/29/200657Date Forwarded to Examiner
8/28/2006Amendment/Req. Reconsideration-After Non-Final Reject Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/28/2006Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/28/2006Terminal Disclaimer Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/28/2006Power of Attorney Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/28/2006Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
8/28/2006EFS Acknowledgment Receipt Office Actions Communications
8/28/2006Terminal Disclaimer Filed
8/28/2006Response after Non-Final Action
8/28/200658Terminal Disclaimer Filed
8/28/200656Response after Non-Final Action
7/18/2006Non-Final Rejection Office Actions Communications
7/18/2006List of references cited by examiner Documents including citations
7/18/2006Index of Claims In-house documents including Examiner Notes/Search Results
7/18/2006Search information including classification, databases and other search related notes Documents including classifications
7/18/2006Mail Non-Final Rejection
7/18/200655Mail Non-Final Rejection
7/7/2006Non-Final Rejection
7/7/200654Non-Final Rejection
5/3/2006Date Forwarded to Examiner
5/3/2006Date Forwarded to Examiner
5/3/2006Disposal for a RCE / CPA / R129
5/3/200653Date Forwarded to Examiner
5/3/200651Date Forwarded to Examiner
5/3/200649Disposal for a RCE / CPA / R129
5/2/2006Amendment Submitted/Entered with Filing of CPA/RCE Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/2/2006Claims Application Documents
5/2/2006Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/2/2006Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/2/2006EFS Acknowledgment Receipt Office Actions Communications
5/2/2006Extension of Time Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/2/2006Request for Continued Examination (RCE) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/2/2006EFS Acknowledgment Receipt Office Actions Communications
5/2/2006Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
5/2/2006Request for Continued Examination (RCE)
5/2/2006Request for Extension of Time - Granted
5/2/200650Request for Continued Examination (RCE)
5/2/200648Request for Extension of Time - Granted
3/28/2006Advisory Action (PTOL-303) Office Actions Communications
3/28/2006Amendment After Final or under 37CFR 1.312, initialed by the examiner. In-house documents including Examiner Notes/Search Results
3/28/2006Mail Advisory Action (PTOL - 303)
3/28/200647Mail Advisory Action (PTOL - 303)
3/23/2006Advisory Action (PTOL-303)
3/23/200646Advisory Action (PTOL-303)
3/13/2006Date Forwarded to Examiner
3/13/200645Date Forwarded to Examiner
3/8/2006Response After Final Action Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/8/2006Claims Application Documents
3/8/2006Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/8/2006Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/8/2006Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
3/8/2006Response after Final Action
3/8/200644Response after Final Action
1/11/2006Final Rejection Office Actions Communications
1/11/2006Index of Claims In-house documents including Examiner Notes/Search Results
1/11/2006Search information including classification, databases and other search related notes Documents including classifications
1/11/2006Mail Final Rejection (PTOL - 326)
1/11/200643Mail Final Rejection (PTOL - 326)
1/9/2006Final Rejection
1/9/200642Final Rejection
11/7/2005Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
11/7/2005Index of Claims In-house documents including Examiner Notes/Search Results
11/4/2005Date Forwarded to Examiner
11/4/2005Date Forwarded to Examiner
11/4/2005Disposal for a RCE / CPA / R129
11/4/200541Date Forwarded to Examiner
11/4/200539Date Forwarded to Examiner
11/4/200537Disposal for a RCE / CPA / R129
10/27/2005Amendment Submitted/Entered with Filing of CPA/RCE Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/27/2005Claims Application Documents
10/27/2005Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/27/2005Request for Continued Examination (RCE) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/27/2005Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/27/2005Extension of Time Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/27/2005Request for Continued Examination (RCE)
10/27/2005Request for Extension of Time - Granted
10/27/2005Workflow - Request for RCE - Begin
10/27/200538Request for Continued Examination (RCE)
10/27/200536Request for Extension of Time - Granted
10/27/200535Workflow - Request for RCE - Begin
5/27/2005Final Rejection Office Actions Communications
5/27/2005Index of Claims In-house documents including Examiner Notes/Search Results
5/27/2005Search information including classification, databases and other search related notes Documents including classifications
5/27/2005Mail Final Rejection (PTOL - 326)
5/27/200534Mail Final Rejection (PTOL - 326)
5/26/2005Final Rejection
5/26/200533Final Rejection
3/18/2005PARALEGAL OR ELECTRONIC TERMINAL DISCLAIMER APPROVED
3/18/200532PARALEGAL OR ELECTRONIC TERMINAL DISCLAIMER APPROVED
3/17/2005Date Forwarded to Examiner
3/17/200530Date Forwarded to Examiner
2/24/2005Amendment/Req. Reconsideration-After Non-Final Reject Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/24/2005Claims Application Documents
2/24/2005Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/24/2005Terminal Disclaimer Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/24/2005Extension of Time Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/24/2005Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/24/2005Authorization for Extension of Time all replies Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/24/2005Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
2/24/2005Terminal Disclaimer review decision In-house documents including Examiner Notes/Search Results
2/24/2005Terminal Disclaimer Filed
2/24/2005Response after Non-Final Action
2/24/2005Request for Extension of Time - Granted
2/24/200531Terminal Disclaimer Filed
2/24/200529Response after Non-Final Action
2/24/200528Request for Extension of Time - Granted
9/17/2004Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
8/30/2004Non-Final Rejection Office Actions Communications
8/30/2004List of References cited by applicant and considered by examiner Documents including citations
8/30/2004Index of Claims In-house documents including Examiner Notes/Search Results
8/30/2004Bibliographic Data Sheet Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/30/2004Search information including classification, databases and other search related notes Documents including classifications
8/30/2004Mail Non-Final Rejection
8/30/200426Mail Non-Final Rejection
8/27/2004Non-Final Rejection
8/27/200425Non-Final Rejection
8/13/2004Request for Refund
8/13/200427Request for Refund
8/6/2004Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
8/6/2004Index of Claims In-house documents including Examiner Notes/Search Results
7/26/2004Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
7/26/2004Foreign Reference Documents including citations
7/26/2004Foreign Reference Documents including citations
7/26/2004Foreign Reference Documents including citations
7/26/2004Foreign Reference Documents including citations
7/26/2004Non Patent Literature
7/26/2004Non Patent Literature
7/26/2004Miscellaneous Internal Document In-house documents including Examiner Notes/Search Results
7/26/2004Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
7/26/2004Reference capture on IDS
7/26/2004Information Disclosure Statement (IDS) Filed
7/26/2004Information Disclosure Statement (IDS) Filed
7/26/200424Reference capture on IDS
7/26/200423Information Disclosure Statement (IDS) Filed
7/1/2004Date Forwarded to Examiner
7/1/200421Date Forwarded to Examiner
6/14/2004Amendment/Req. Reconsideration-After Non-Final Reject Written Arguments, Opinions, Incoming amendments, Papers received from applicants
6/14/2004Claims Application Documents
6/14/2004Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
6/14/2004Extension of Time Written Arguments, Opinions, Incoming amendments, Papers received from applicants
6/14/2004Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
6/14/2004Terminal Disclaimer Filed
6/14/2004Response after Non-Final Action
6/14/2004Request for Extension of Time - Granted
6/14/2004Workflow incoming petition IFW
6/14/2004Workflow incoming amendment IFW
6/14/200422Terminal Disclaimer Filed
6/14/200420Response after Non-Final Action
6/14/200419Request for Extension of Time - Granted
6/14/200418Workflow incoming petition IFW
6/14/200417Workflow incoming amendment IFW
5/13/2004Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
5/13/2004Non Patent Literature
5/13/2004Foreign Reference Documents including citations
5/13/2004Non Patent Literature
5/13/2004Non Patent Literature
5/13/2004Reference capture on IDS
5/13/2004Information Disclosure Statement (IDS) Filed
5/13/2004Information Disclosure Statement (IDS) Filed
5/13/200416Reference capture on IDS
5/13/200415Information Disclosure Statement (IDS) Filed
1/15/2004Non-Final Rejection First Office Action (substantive examination)
1/15/2004List of References cited by applicant and considered by examiner Documents including citations
1/15/2004List of references cited by examiner Documents including citations
1/15/2004Foreign Reference Documents including citations
1/15/2004Index of Claims In-house documents including Examiner Notes/Search Results
1/15/2004Search information including classification, databases and other search related notes Documents including classifications
1/15/2004Mail Non-Final Rejection
1/15/200413Mail Non-Final Rejection
1/12/2004Non-Final Rejection
1/12/200412Non-Final Rejection
12/15/2003Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
12/15/2003Non Patent Literature
12/15/2003Non Patent Literature
12/15/2003Information Disclosure Statement (IDS) Filed
12/15/2003Information Disclosure Statement (IDS) Filed
12/15/200314Information Disclosure Statement (IDS) Filed
10/27/2003IFW TSS Processing by Tech Center Complete
10/27/200311IFW TSS Processing by Tech Center Complete
7/7/2003Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
7/7/2003Foreign Reference Documents including citations
7/7/2003Foreign Reference Documents including citations
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Non Patent Literature
7/7/2003Information Disclosure Statement (IDS) Filed
7/7/2003Information Disclosure Statement (IDS) Filed
7/7/200310Information Disclosure Statement (IDS) Filed
1/9/2003Case Docketed to Examiner in GAU
1/9/20037Case Docketed to Examiner in GAU
10/16/2002Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
10/16/2002Information Disclosure Statement (IDS) Filed
10/16/2002Information Disclosure Statement (IDS) Filed
10/16/2002Application Dispatched from OIPE
10/16/20029Information Disclosure Statement (IDS) Filed
10/16/20026Application Dispatched from OIPE
10/15/2002Application Is Now Complete
10/15/20025Application Is Now Complete
10/5/2002IFW Scan & PACR Auto Security Review
10/5/20023IFW Scan & PACR Auto Security Review
9/30/2002Transmittal of New Application Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/30/2002Application Data Sheet Application Documents
9/30/2002Specification Application Documents
9/30/2002Claims Application Documents
9/30/2002Abstract Application Documents
9/30/2002Drawings-only black and white line drawings Application Documents
9/30/2002Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
9/30/2002Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
9/30/2002Claims Worksheet (PTO-2022) In-house documents including Examiner Notes/Search Results
9/30/2002Electronic Filing of Original Application Papers
9/30/2002Initial Exam Team nn
9/30/20022Electronic Filing of Original Application Papers
9/30/20021Initial Exam Team nn