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WET ETCHING METHOD OF REMOVING SILICON FROM A SUBSTRATE

10/625,166 | U.S. Patent Application

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Location ELECTRONIC

Filed July 22, 2003

Examiner STEPHEN W SMOOT

Class 438

Art Group 2813

Patent No. 7,166,539

Case Type Utility - 438/753000

Status Patented Case

Child 11/207,115 Patented

Child 11/583,633 Patented

Child 11/648,272 Patented

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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WET ETCHING METHOD OF REMOVING SILICON FROM A SUBSTRATE

10/625,166 | U.S. Patent Application

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