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Copper sputtering targets and methods of forming copper sputtering targets

10/614,807 | U.S. Patent Application

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Location ELECTRONIC
Filed July 9, 2003
Examiner HARRY D WILKINS III
Class 148
Art Group 1795
Case Type Utility - 148/669000
Status Abandoned -- After Examiner's Answer or Board of Appeals Decision
Parent 09/465,492 Patented
Parent 60/396,544 Expired
Parent 60/471,182 Expired
Child 12/235,427 Patented
Child PCT/US03/22080 Published
Last Updated: 4 years, 1 month ago
Date # Transaction