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Inventors

Yukio Nishimura Hiroyuki Ishii Isao Nishimura Eiichi Kobayashi

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JSR CORPORATION

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RADIATION-SENSITIVE RESIN COMPOSITION

10/533,223 | U.S. Patent Application

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Location ELECTRONIC

Filed April 27, 2006

Examiner AMANDA C WALKE

Class 430

Art Group 1795

Patent No. 7,521,169

Case Type Utility - 430/270100

Status Patented Case

Parent PCT/JP03/13560 -

Child 12/348,171 Patented

Child 2002-315021

Child 2003-192477

Last Updated: 5 years, 2 months ago

Date	#	Transaction
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RADIATION-SENSITIVE RESIN COMPOSITION

10/533,223 | U.S. Patent Application

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