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OPTICAL POSITION MEASURING SYSTEM USING AN INTERFERENCE PATTERN

10/426,632 | U.S. Patent Application

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Location ELECTRONIC
Filed May 1, 2003
Examiner SARAH J CHISDES
Class 356
Art Group 2877
Patent No. 7,009,713
Case Type Utility - 356/496000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child P2002-130341
Child P2002-336341
Last Updated: 4 years, 10 months ago
Date # Transaction