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HIGH-DENSITY PLASMA SOURCE USING EXCITED ATOMS

10/249,844 | U.S. Patent Application

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Location ELECTRONIC
Filed May 12, 2003
Examiner EPHREM ALEMU
Class 315
Art Group 2821
Patent No. 6,806,652
Case Type Utility - 315/111210
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 10/249,595 Patented
Child PCT/US04/10968 Published
Child 10/249,595
Last Updated: 4 years, 4 months ago
Date # Transaction