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PLASMA REACTOR HAVING RF POWER APPLICATOR AND A DUAL-PURPOSE WINDOW

10/21,195 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 30, 2001
Examiner LUZ L ALEJANDRO MULERO
Class 156
Art Group 1763
Patent No. 6,790,311
Case Type Utility - 156/345480
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 09/350,234 Patented
Parent 08/733,555 Patented
Parent 08/648,254 Patented
Parent 08/580,026 Abandoned
Parent 08/41,796 Patented
Parent 07/722,340 Abandoned
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Last Updated: 4 years, 6 months ago
Date # Transaction