Download Docs
Export

PARALLEL-PLATE ELECTRODE PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA COUPLING POWER THROUGH A PARALLEL PLATE ELECTRODE

10/2,940 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location FILE REPOSITORY (FRANCONIA)
Filed Nov. 27, 2001
Examiner THI D DANG
Class 156
Art Group 1763
Patent No. 6,572,732
Case Type Utility - 156/345480
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/936,028 Patented
Parent 08/521,668 Abandoned
Parent 08/289,336 Abandoned
Parent 07/984,045 Abandoned
Last Updated: 4 years, 10 months ago
Date # Transaction