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LOW CEILING TEMPERATURE PROCESS FOR A PLASMA REACTOR WITH HEATED SOURCE OF A POLYMER-HARDENING PRECURSOR MATERIAL

10/2,397 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 31, 2001
Examiner ALLAN W OLSEN
Class 216
Art Group 1763
Patent No. 6,818,140
Case Type Utility - 216/068000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 09/8,151 Abandoned
Parent 08/734,797 Patented
Parent 08/648,254 Patented
Parent 08/580,026 Abandoned
Parent 08/41,796 Patented
Parent 07/722,340 Abandoned
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Last Updated: 4 years, 11 months ago
Date # Transaction