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BIASED PULSE DC REACTIVE SPUTTERING OF OXIDE FILMS

10/101,863 | U.S. Patent Application

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Location ELECTRONIC
Filed March 16, 2002
Examiner MICHELLE MANDALA
Class 438
Art Group 2823
Patent No. 7,378,356
Case Type Utility - 438/788000
Status Patented Case
Child 10/954,182 Patented
Child 11/228,834 Patented
Child 11/228,717 Patented
Child 11/191,643 Patented
Last Updated: 4 years, 7 months ago
Date # Transaction