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METAL OXYNITRIDE CAPACITOR BARRIER LAYER

09/997,920 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Nov. 30, 2001
Examiner BRADLEY SMITH
Class 257
Art Group 2824
Patent No. 6,664,583
Case Type Utility - 257/410000
Status Patented Case
Parent 09/484,815 Patented
Child 10/688,678 Patented
Last Updated: 4 years, 4 months ago
Date # Transaction