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METAL OXYNITRIDE CAPACITOR BARRIER LAYER

09/997,876 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Nov. 30, 2001
Examiner NGUYEN T HA
Class 361
Art Group 2831
Patent No. 6,631,069
Case Type Utility - 361/306300
Status Patented Case
Parent 09/484,815 Patented
Last Updated: 4 years, 6 months ago
Date # Transaction