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Inventors

SHAMOUIL SHAMOUILIAN ANANDA H. KUMAR KADTHALA R. NARENDRNATH ERIC ASKARINAM EDWIN C. WELDON MICHAEL RICE KENNETH S. COLLINS

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APPLIED MATERIALS, INC.

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PROCESS CHAMBER HAVING IMPROVED TEMPERATURE CONTROL

09/82,430 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed May 20, 1998

Examiner STEVEN H VERSTEEG

Class 118

Art Group 1753

Patent No. 6,440,221

Case Type Utility - 118/724000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent 08/893,393 Patented

Parent 08/733,555 Patented

Parent 08/648,254 Patented

Last Updated: 4 years, 8 months ago

Date	#	Transaction
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09/82,430 | U.S. Patent Application

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