Download Docs
Export

INDUCTIVELY COUPLED RF PLASMA REACTOR HAVING AN ANTENNA ADJACENT A WINDOW ELECTRODE

09/675,319 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location FILE REPOSITORY (FRANCONIA)
Filed Sept. 29, 2000
Examiner RODNEY GLENN MCDONALD
Class 156
Art Group 1753
Patent No. 6,444,085
Case Type Utility - 156/345000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/648,254 Patented
Parent 08/580,026 Abandoned
Parent 08/41,796 Patented
Parent 07/722,340 Abandoned
Parent 08/503,467 Patented
Parent 08/138,060 Patented
Show All
Last Updated: 4 years, 4 months ago
Date # Transaction