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MAGNETIC CONFINEMENT IN A PLASMA REACTOR HAVING AN RF BIAS ELECTRODE

09/563,825 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed May 3, 2000
Examiner THI D DANG
Class 156
Art Group 1763
Patent No. 6,488,807
Case Type Utility - 156/345000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/41,118 Patented
Parent 07/722,340 Abandoned
Parent 07/626,050 Abandoned
Parent 07/624,670 Patented
Parent 07/559,947 Abandoned
Parent 07/416,750 Abandoned
Last Updated: 5 years ago
Date # Transaction