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PARALLEL-PLATE ELECTRODE PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA AND ADJUSTABLE RADIAL DISTRIBUTION OF PLASMA ION DENSITY

09/539,814 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed March 30, 2000
Examiner THI D DANG
Class 156
Art Group 1763
Patent No. 6,524,432
Case Type Utility - 156/345000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/740,124 Patented
Parent 08/597,577 Patented
Parent 08/648,254 Patented
Parent 08/740,124 Patented
Parent 08/597,577 Patented
Parent 08/648,254 Patented
Last Updated: 4 years, 8 months ago
Date # Transaction