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PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA COUPLING POWER THROUGH A PARALLEL PLATE ELECTRODE

09/523,824 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed March 13, 2000
Examiner RUDY ZERVIGON
Class 156
Art Group 1763
Patent No. 6,623,596
Case Type Utility - 156/345000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/597,577 Patented
Parent 08/289,336 Abandoned
Last Updated: 5 years ago
Date # Transaction