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THERMAL CONTROL APPARATUS FOR INDUCTIVELY COUPLED RF PLASMA REACTOR HAVING AN OVERHEAD SOLENOIDAL ANTENNA

09/520,623 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed March 7, 2000
Examiner RODNEY GLENN MCDONALD
Class 156
Art Group 1753
Patent No. 6,514,376
Case Type Utility - 156/345370
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/648,254 Patented
Parent 08/580,026 Abandoned
Parent 08/41,796 Patented
Parent 07/722,340 Abandoned
Parent 08/503,467 Patented
Parent 08/138,060 Patented
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Last Updated: 4 years, 6 months ago
Date # Transaction