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PLASAMA REACTOR USING INDUCTIVE RF COUPLING AND PROCESSES

09/504,312 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Feb. 15, 2000
Examiner THI D DANG
Class 156
Art Group 1763
Patent No. 6,518,195
Case Type Utility - 156/345000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/948,560 Patented
Parent 08/41,118 Patented
Parent 07/722,340 Abandoned
Last Updated: 4 years, 2 months ago
Date # Transaction