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LOW DENSITY HIGH FREQUENCY PROCESS FOR A PARALLEL-PLATE ELECTRODE PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA

09/480,007 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Jan. 10, 2000
Examiner THI D DANG
Class 156
Art Group 1763
Patent No. 6,444,084
Case Type Utility - 156/345000
Status Patented Case
Parent 09/23,365 Patented
Parent 08/740,124 Patented
Parent 08/597,577 Patented
Parent 08/648,254 Patented
Last Updated: 5 years ago
Date # Transaction