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METHOD OF FORMING AN ALIGNMENT FEATURE IN OR ON A MULTILAYERED SEMICONDUCTOR STRUCTURE

09/456,224 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Dec. 7, 1999
Examiner JOANNIE A GARCIA
Class 438
Art Group 2823
Patent No. 6,576,529
Case Type Utility - 438/401000
Status Patented Case
Child 09/867,202 Patented
Child 10/704,449 Patented
Last Updated: 7 months, 1 week ago
Date # Transaction