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THERMAL CONTROL APPARATUS FOR INDUCTIVELY COUPLED RF PLASMA REACTOR HAVING AN OVERHEAD SOLENOIDAL ANTENNA

09/350,234 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 9, 1999
Examiner LUZ L ALEJANDRO MULERO
Class 118
Art Group 1763
Patent No. 6,365,063
Case Type Utility - 118/723000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/733,555 Patented
Parent 08/648,254 Patented
Child 10/21,195 Patented
Last Updated: 1 year, 6 months ago
Date # Transaction