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PROCESSES USED IN AN INDUCTIVELY COUPLED PLASMA REACTOR

09/328,914 | U.S. Patent Application

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Location ELECTRONIC
Filed June 9, 1999
Examiner GEORGE A GOUDREAU
Class 438
Art Group 1763
Case Type Utility - 438/712000
Status Abandoned -- Failure to Respond to an Office Action
Parent 08/41,118 Patented
Parent 07/722,340 Abandoned
Parent 07/626,050 Abandoned
Parent 07/624,670 Patented
Parent 07/559,947 Abandoned
Last Updated: 4 years, 1 month ago
Date # Transaction