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MICHAEL RICE JEFFREY MARKS DAVID W. GROECHEL NICOLAS J. BRIGHT

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PLASMA ETCH APPARATUS WITH HEATED SCAVENGING SURFACES

09/3,867 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Jan. 7, 1998

Examiner THI D DANG

Class 216

Art Group 1763

Patent No. 6,083,412

Case Type Utility - 216/067000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent 08/503,467 Patented

Last Updated: 4 years, 4 months ago

Date	#	Transaction
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PLASMA ETCH APPARATUS WITH HEATED SCAVENGING SURFACES

09/3,867 | U.S. Patent Application

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