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LOW DENSITY HIGH FREQUENCY PROCESS FOR A PARALLEL- PLATE ELECTRODE PLASMA REACTOR HAVING AN INDUCTIVE ANTENNA

09/23,365 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Feb. 13, 1998
Examiner THI D DANG
Class 216
Art Group 1763
Patent No. 6,036,878
Case Type Utility - 216/068000
Status Patented Case
Parent 08/740,124 Patented
Parent 08/597,577 Patented
Parent 08/648,254 Patented
Child 09/480,007 Patented
Last Updated: 2 years, 2 months ago
Date # Transaction