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METHOD FOR FORMING SHALLOW TRENCH ISOLATION WITH GLOBAL PLANARIZATION

08/988,034 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Dec. 10, 1997
Examiner WILLIAM A POWELL
Class 438
Art Group 1765
Patent No. 6,060,394
Case Type Utility - 438/692000
Status Patented Case
Parent 08/733,555 Patented
Parent 08/648,254 Patented
Parent 08/580,026 Abandoned
Parent 08/41,796 Patented
Parent 07/722,340 Abandoned
Parent 08/503,467 Patented
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Last Updated: 1 year, 6 months ago
Date # Transaction